5 Channel Optical Sensor: Contactless measurement of wafers and solar cells
The new CHRocodile MI5 is the modular 5 channel version of the already well established CHRocodile IT sensor. It performs high-precision, non-contact distance and layer thickness measurements on wafers and solar cells at up to 5 different locations. With one measuring head per channel, it is capable of measuring up to 1 mm thick silicon from one side. Measurements can also be taken on other common infrared transparent materials, such as GaAs.
The basis for this nondestructive measuring method is an interferometric sensor which examines the substrate with infrared light. The CHRocodile MI5 is designed for simple and direct integration into the production process. One possible application is the inline thickness measurement of Si-wafers on a conveyor belt